| 摘要 |
PURPOSE:To prevent the mistake of a pickup in an automatic pellet bonding device by mounting a detector at a collet so that incident light can be prevented by an adsorbed pellet and arranging a parallel light generator under a passage route in which the collet reciprocates. CONSTITUTION:A hybrid IC substrate 12 is, for example, installed at the bonding position on rails 23, and pellets 10a-10c placed on tape groups 11a-11c are adsorbed by a plurality of collet groups 13a-13c and are bonded. A photodetector 18 is mounted at the end of an adsorbing hole 16 formed vertically at each collet 13, and is evacuated in vacuum via a side tube 17 so as to shield the light when the pellet 10 is attracted. A single light source 20 and a concave mirror 21 are provided under the route of each collet to form a horizontal parallel light beam, which is converted to vertical parallel light beam via a reflecting mirror 22 to be incident to the hole 16. In this manner, a parallel light generator of a simple structure is arranged, thereby preventing the mistake of the pickup of the pellet. |
