| 摘要 |
PURPOSE:To test the leak of the equipment under test by the compact and light device which can be freely transported, by providing a tabble on which the gas sealed equipment under test is placed, a cover which covers the equipment under test on the table in a hermetically sealing way, and a means by which the inside of the cover is evacuated to make a vacuum state and N2 gas and the like are inputted. CONSTITUTION:The SF6 sealed equipment under test and the like 1 are placed on the table 2, and covered by the cover (with vacuum resistance property) 4 wherein a screw plug 5 which can be opened and closed is inserted in a small hole. A valve 3 attached to the table 1 is opened, the inside of the cover 4 is evacuated by a pump 6, refined N2 gas, dried air, or the like 7 is inputted, and the valve 3 is closed. After the predetermined time, the plug 5 is opened, a detector is inserted, and the concentration of SF6 leaked from the equipment under test 1 is measured. Then, after the predetermined time, the measurement is performed again, and the leaking speed and the like are measured. In this constitution, the measurement can be performed by the compact and light device in any place, and fine leakage can be accurately detected. |
