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发明名称
DEVICE FOR NON-DESTRUCTIVE CHECKING OF SEMICONDUCTOR STRUCTURES
摘要
申请公布号
SU947791(A1)
申请公布日期
1982.07.30
申请号
SU19802987882
申请日期
1980.10.03
申请人
BRUSS G UNIV IM.V.I.LENINA
发明人
DROZDOV NIKOLAJ A,SU;PATRIN ALEKSEJ A,SU;PODOLNYJ EDUARD I,SU;SAVOTIN YURIJ I,SU
分类号
H01L21/66;G01R31/26;G01R31/28;(IPC1-7):G01R31/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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