STEP AND REPEAT CAMERA DEVICE

摘要

PURPOSE:To prevent the formation of a defective mask surely by providing an automatic foreign matter inspecting part integrally between a reticle loader part and a step and repeat camera. CONSTITUTION:An automatic foreign matter inspecting part 11 is provided with a foreign matter inspecting machine 13 above an inspecting table 12 placed thereon with a reticle 9 horizontally. The machine 13 has a laser beam source 14 and a photodetecting part 15, and is so arranged that the laser beam irradiating the surface of the reticle 9 from the beam source 14 and irregularly reflected by foregin matter (x) is detected with the part 15. An air nozzle 16 for removing foreign matter is provided in proximity to the machine 13, so that the foreign matter stuck on the reticle 9 can be removed with ejecting air. This air nozzle 16 is controlled by a foreign matter decision circuit 17 connected to the machine 13.