| 摘要 |
PURPOSE:To enable the use of a polymer with a low heat diffusion rate and to enhance the endurance of a thin film applied produce by enabling the cooling of a target when a thin film is formed on the surface of an object by sputtering. CONSTITUTION:The titled apparatus is composed of a mechanism transferring an object 3 on which a thin polymer film is formed in a vacuum vessel 1, a flexible electret, a mechanism cooling the electret, and a mechanism 9 generating magnetism. Said electret is used as a target 4, and the adhesion to a cooling jacket 6 is increased by static electricity or the like to efficiently cool a polymer molding. Thus, a thin film applied product with superior endurance is obtd. efficiently. |
