| 摘要 |
There is disclosed a fugitive vehicle system comprising at least two organic components, at least one component being a solid polymeric material capable of pyrolyzing in a non-oxygen containing environment and at least one other component being a solvent for the solid polymeric material, the solvent being capable of removal at a temperature below the pyrolyzing temperature of the polymeric material. This fugitive vehicle system is especially suitable in microelectronic applications.
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