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发明名称
摘要
申请公布号	JPS57119538(U)	申请公布日期	1982.07.24
申请号	JP19810006435U	申请日期	1981.01.19
申请人		发明人
分类号	H01L21/66;H01L21/60	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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