FORMATION OF LIGHT INTEGRATED WAVE GUIDE CIRCUIT

摘要

Optical waveguide circuits, such as signal splitters, can be produced by etching grooves in a transparent, glass substrate and by filling the grooves with glass having a higher refractive index than the material of the substrate. The grooves have a semicircular cross-section and the filling glass is produced by a low temperature plasma-activated chemical vapor deposition process. Two substrates can be placed on top of each other, with the surfaces in which the filled grooves have been provided in contact, to form an integrated optical circuit.