| 摘要 |
PURPOSE:To correct white spot defects precisely while observing the change in the properties of a correcting material which deposits metal of low resistance when irradiated with laser light by the irradiation of laser by means of reference light by using said material. CONSTITUTION:A metallic chelate polymer of ethylene imine contg. Cr, Cu, Pd, etc. as metal or a metal complex soln. prepd. by adding silver nitrate, cobalt nitrate or copper nitrate to an org. solvent of which light shielding characteristic is improved when irradiated with laser light is used as a correcting material, and is coated on a defective part 4 and around this. Next, light of <=1.3mum wavelength is irradiated to cause a change in its properties, and the reflected images of the observation light from a photomask 1 and a correcting material 3 or reference light are discriminated. When the difference in the contrast within said reflection attains a constant value or below, the irradiation is stopped right after this or after a constant time. |
