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发明名称
SOLUTION FOR SELECTIVE ETCHING OF METAL SILICIDE RESISTIVE LAYERS
摘要
申请公布号
SU946016(A1)
申请公布日期
1982.07.23
申请号
SU19802963206
申请日期
1980.07.24
申请人
SHNIPKO TATYANA S,SU;UDALENKOVA TATYANA V,SU
发明人
SHNIPKO TATYANA S,SU;UDALENKOVA TATYANA V,SU
分类号
H05K3/06;C23F1/00;(IPC1-7):H05K3/06
主分类号
H05K3/06
代理机构
代理人
主权项
地址
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