| 摘要 |
PURPOSE:To eliminate unproductive time a test equipment may experience by a method wherein two pairs of testing stages are provided and some wafers are checked for parallelism and positioning on a pair of stages while others are subjected to some other tests on the other stages. CONSTITUTION:Provided on one side of a test equipment 1 are two measuring stages 6a and transportation lanes 4a and 5a extending from the stages 6a and coupled with housings 2a and 3a for wafers to be measured. Provided symmetrically on the other side of the test equipment 1 are two measuring stages 6b and transportation lanes 4b and 5b extending from the stages 6b and coupled with housings 2b and 3b for measured wafers. This setup allows wafers to be checked for parallelism and positioning on the stages 6b belonging to one of the two lineups while some others are subjected to tests on the stages 6a belonging to the other lineup, enabling the test equipment to waste no time and thus to improve commission rate. |
