发明名称 SETT FOR JUSTERING AV DE ELEKTRISKA KARATERISTIKORNA HOS EN HALVLEDARANORDNING GENOM BILDANDE AV REKOMBINATIONSCENTRA GENOM BESTRALNING AV ELEKTRONER
摘要 Disclosed is a method of manufacturing semiconductor devices including a step of irradiating the devices to alter the turnoff and forward drop characteristics thereof. The irradiation is carried out at a temperature above 100 DEG C, and preferably in the range of 150 DEG to 375 DEG C. No post irradiation annealing step is required.
申请公布号 SE424484(B) 申请公布日期 1982.07.19
申请号 SE19770005140 申请日期 1977.05.03
申请人 GENERAL ELECTRIC COMPANY 发明人 Y S E * SUN
分类号 H01L29/74;H01L21/263;H01L21/322;H01L29/744;H01L29/747;H01L29/861;(IPC1-7):01L21/26 主分类号 H01L29/74
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