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发明名称
摘要
申请公布号
JPS5732388(Y2)
申请公布日期
1982.07.16
申请号
JP19780123156U
申请日期
1978.09.04
申请人
发明人
分类号
F23Q3/00;H01L41/08;H01L41/113;H02N2/00;(IPC1-7):F23Q3/00
主分类号
F23Q3/00
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