FORMATION OF TRANSPARENT CONDUCTIVE TIN OXIDE FILM

摘要

PURPOSE:To form a transparent conductive tin oxide film having an excellent specific resistance value and visible light transmittance even if a raw material soln. decreased in the compounding ratio of fluorine with tin is used, by using ammonium fluoride and hydrogen fluoride as a fluorine compd. CONSTITUTION:The transparent conductive tin oxide film is formed on the surface of a heated substrate by coating a soln. contg. a tin compd. and fluorine compd. on the surface of said substrate. The ammonium fluoride and hydrogen fluoride are used as the fluorine compd. in this case. More specifically, the transparent conductive tin oxide film which contains the fluorine and has the specific resistance value and visible light transmittance equal to or better than the specific resistance value and visible light transmittance of the transparent conductive tin oxide film obtd. by the conventional method is formable even if the raw material soln. decreased in the compounding ratio of fluorine with tin to the ratio smaller than in the conventional method using the ammonium fluoride as the fluorine compd. is used.