MASKE ZUR VERWENDUNG BEI LITHOPRAPHISCHEN VERFAHREN

摘要

A mask for use with soft X-rays or flood beams of ions comprises a thin metallic foil 12 transparent to X-rays and ions supported in tension on a frame 10 and carrying a pattern 20 opaque to the X-rays and ions. The frame, which is opaque to the X-rays and ion beams but transparent to visible light extends beyond the edge of the foil and carries markings for optically aligning the mask with a substrate this allows conventional registration techniques to be used while achieving high resolution due to the exposure with X-ray or ion beams.