| 摘要 |
PURPOSE:To prevent the deterioration of surface acoustic wave characteristics without losing bonding performance, by forming a part of an aluminum electrode of an interdigital transducer formed on a piezoelectric substrate with porous vapor-deposited film or oxide vapor-deposited film. CONSTITUTION:An aluminum solid vapor-deposited film 16 is formed, about 0.2mum thick under vacuum on a piezoelectric substrate 1. A porous vapor-deposited film 17 is formed, 0.5-0.6mum thick under 10<-1>-10<-2> Torr. in the vapor- deposited layer. A conventional aluminum vacuum-deposited film 16 is formed on the film 17 by about 0.2mum in thickness. Thus formed interdigital transducer 2 of 3-layered construction is formed with about 1mum electrode film thickness, the mass is equivalent to 0.5mum vacuum deposited film, the deterioration of characteristics due to the reflection of surface waves and bonding performance is excellent as electrode construction. A part of the film 17 is oxidized, and to avoid oxidation, inactive gas such as N2 and Ar is introduced for atmospheric vapor deposition. |
