发明名称 STELLANTRIEB
摘要 A position drive for a wafer in a system for testing of integrated circuit components of the wafer includes a first drive assembly for quick lifting of a wafer-supporting member towards testing probes, second drive assembly for positioning the wafer-supporting member in two stable positions in a vertical direction for compensating thickness allowances of the wafers to be tested and a third drive assembly for mechanical rotation of the wafer-supporting member through any required angle.
申请公布号 DD155863(A3) 申请公布日期 1982.07.14
申请号 DD19800225885 申请日期 1980.12.09
申请人 RIESSLAND,EBERHARD,DD;KRUEGER,KARL-HEINZ,DD 发明人 RIESSLAND,EBERHARD,DD;KRUEGER,KARL-HEINZ,DD
分类号 H01L21/68;G01R1/073;G01R31/28;(IPC1-7):H01L21/68 主分类号 H01L21/68
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