发明名称 Method for fabricating adjacent conducting and insulating regions in a film by laser irradiation
摘要 A method for fabricating adjacent electrically conducting and insulating regions in a silicon film is described. A substantially insulating layer of oxygenated, N or P doped, non-single crystalline silicon film is first formed. The film is then selectively laser irradiated so as to form an irradiated portion which is substantially conducting.
申请公布号 US4339285(A) 申请公布日期 1982.07.13
申请号 US19800172757 申请日期 1980.07.28
申请人 RCA CORPORATION 发明人 PANKOVE, JACQUES I.
分类号 H01L21/268;H01L21/314;H01L21/336;(IPC1-7):H01L21/26;H01L21/26 主分类号 H01L21/268
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