发明名称 Planar circuit fabrication by plating and liftoff
摘要 The method of manufacturing predetermined microcircuit conductor patterns, which includes forming on the surface plane of a substrate a layer of insulator material, forming a layer of resist on the layer of insulator material, patterning the layer of resist to define a channel pattern, etching the channel pattern with relatively overwide channels, conditioning the channel bases to receive plating material, and thereafter filling the overwide channels with the plating material to a height at least substantially co-planar with the insulator material to define the predetermined conductor patterns, removing the mask and plated material thereon to uncover completely the conductor pattern.
申请公布号 US4339305(A) 申请公布日期 1982.07.13
申请号 US19810231712 申请日期 1981.02.05
申请人 ROCKWELL INTERNATIONAL CORPORATION 发明人 JONES, ADDISON B.
分类号 H01F41/34;H01L21/48;H05K1/03;H05K3/00;H05K3/04;H05K3/10;H05K3/24;H05K3/46;(IPC1-7):B44C1/22;C03C15/00;C03C25/06;B29C17/08 主分类号 H01F41/34
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