| 摘要 |
PURPOSE:To realize the simple measurement of both a virtual intersection distance and the inclined angle of a hole, by transmitting the light through the 1st pierced hole of a specimen having two pierced holes, giving the reflection to the light with a reflector which is set at a position spart from the 1st hole by a virtual intersection distance and can be controlled in three axial directions, receiving the reflected light through the 2nd pierced hole and then measuring the distance and angle of each part at that moment. CONSTITUTION:A reflector 5 is put on a measuring stage via a control stage 6 at the side of a virtual intersection P of a specimen 1. The stage 6 can be controlled for the position in the X and Y directions as well as for an angle alpha around the Z axis, and is set at virtual intersection distance (l). An autocollimator 10 and a reflector 11 are set on the measuring stand via control stages 12 and 13 at the opposite side of the intersection P. The stages 12 and 13 can be controlled for the angle alpha in both the X and Z axial directions. The light given from the collimator 10 is reflected by the reflectors 5 and 11 through holes 3 and 3a to be measured and then caught again by the collimator 10 as the returned light. Both the virtual intersection distance and inclined angle of a hole of a specimen can be simply measured from angles theta1 and theta2, distance l1 plus angles alpha, alpha and alpha respectively. |
