| 摘要 |
PURPOSE:To judge the completion of picking up all units of die by detecting consecutively pulses without die larger than the number of pulses without die detected prior to the movement in the longitudinal direction by 2 pieces. CONSTITUTION:When a detector unit 9 sends out consecutively 2 pulses 9a indicating die absence in X direction, those pulses are memrized in counters 201, 202, and then memorized in an FF circuit 22 through an AND circuit 21, a generator 23 gives a Y direction drive pulse to a drive unit 4, and an XY table, not shown, is driven in Y direction. Also, the two pulse 9a and the output of the circuit 22 are memorized in counters 251, 252 through an AND circuit 24, but the counters 201, 202, the circuit 22 and the counters 251, 252 are reset by a pulse 9b with die. When 5 pieces of pulse 9a without die are sequentially memorized in counters 251-255 through the AND circuit 24, an AND circuit 26 outputs a wafer completion pulse 26a and stops the machine. |
