发明名称 DIE BONDER
摘要 PURPOSE:To control the falling of a collet by mounting a detecting section consisting of a vacuum switch detecting the error of the adsorption of a die and the clogging of the collet caused by the collet into a piping of a vacuum device connected to the collet. CONSTITUTION:When the die 15 is bonded to a lead frame 16, the detecting section consisting of the vacuum switch detecting the clogging of the collet and the mistake of the adsorption of the die by the collet 7, which adsorbs the die and is connected to a driving section through a collet arm 9, is mounted into the piping of the vacuum device connected to the collet 7, and a collet preventive mechanism preventing the falling of the collet 7 by the signals of the detecting section is set up. Accordingly, since the machine can be self-reset without stopping even when the error of the adsorption of the die and the clogging of the collet are generated, production efficiency is improved, and the yield of products is also ameliorated.
申请公布号 JPS57111036(A) 申请公布日期 1982.07.10
申请号 JP19800186040 申请日期 1980.12.27
申请人 SHINKAWA SEISAKUSHO:KK;SHARP KK 发明人 KUSHIMA YOSHIMITSU;SHIMURA MASAYUKI;KOJIMA HISAAKI;YAMAZAKI MASAO;NISHIZAKI MASASHI
分类号 H01L21/52;H01L21/58 主分类号 H01L21/52
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