DEVICE FOR AUTOMATIC FOCUSING OF IMAGE IN RASTER ELECTRON MICROSCOPE,申请号SU19803004432-传众专利搜索

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发明名称	DEVICE FOR AUTOMATIC FOCUSING OF IMAGE IN RASTER ELECTRON MICROSCOPE
摘要
申请公布号	SU942189(A1)	申请公布日期	1982.07.07
申请号	SU19803004432	申请日期	1980.11.17
申请人	VEPRIK VIKTOR G,SU;DAVIDENKO MIKHAIL D,SU;KAPLICHNYJ VILEN N,SU;KISEL GEORGIJ D,SU;OSTAPOV VLADIMIR K,SU;PAVLENKO PAVEL A,SU	发明人	VEPRIK VIKTOR G,SU;DAVIDENKO MIKHAIL D,SU;KAPLICHNYJ VILEN N,SU;KISEL GEORGIJ D,SU;OSTAPOV VLADIMIR K,SU;PAVLENKO PAVEL A,SU
分类号	H01J37/21;(IPC1-7):H01J37/21	主分类号	H01J37/21
代理机构		代理人
主权项
地址

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