Monolithic microwave integrated circuit with integral array antenna.

摘要

A monolithic microwave integrated circuit including an integral array antenna. The system includes radiating elements, feed network, phasing network, active and/or passive semiconductor devices, digital logic interface circuits and a microcomputer controller simultaneously incorporated on a single substrate by means of a controlled fabrication process sequence. Described is also a method for fabricating planar phase shifter for a monolithic microwave system.