| 摘要 |
PURPOSE:To enable an analysing device to be fully available, even when the sizes o analysed members differ and when the distance between an ion gun and the surface of an analysed member varies with the proceeding of sputtering, by enabling adjustment of the distance between the ion gun and the surface of the analysed member. CONSTITUTION:A mirror tube 1a of an ion gun 1 is supported inside an air- tight case 2, so that the mirror tube 1a can be slidden in the direction of an axial line X-X'. The distance between the ion gun 1 and an analysed member 3 can be adjusted to a desired value (a). Airtight connection between the case 2 and the mirror tube 1a is attained through so called Wilson seal, by pressing with a seal equipment 12, an O-ring 11 which is soft and elastic like rubber and is placed around the outer wall of the mirror tube 1a. The ion gun 1 is moved with an adjusting screw 13, that protrudes on the axial line X-X' in the direction opposite to that of ionic projection. The adjusting screw 13 is rotated with a handle 14, that is provided at the end of the ion gun 1. |
