Miniature electrical connectors and methods of fabricating them.

摘要

A miniature electrical connector comprises a single wafer (1) of silicon having a plurality of octahedral cavities formed therethrough. The connector can be fabricated by the successive steps of growing SiO2 films on opposite sides of a single monocrystalline wafer of silicon having the (100) planes parallel to its surface, forming aligned holes in the SiO2 films, and simultaneously etching both sides of the wafer in an anisotropic etching solution.