发明名称 OPTICAL SENSOR
摘要 PURPOSE:To measure the physical quantity in a simple and effective way, by detecting the difference of the resonance wavelength between a steady beam and an abnormal beam for a Fabry-P'erot resonator to which the physical quantity to be measured is applied. CONSTITUTION:The physical quantity to be measured, e.g. the uniaxial pressure P is applied to a Fabry-P'erot resonator 1 which contains dielectric multilayered films 1b and 1c on both surfaces of a parallel plane plate 1a. The light having the swept wavelength is turned into parallel beams through an optical fiber 2 and a rod lens 3 to be led to a polarizing spectroscope 4. For instance, an abnormal beam of the lateral polarization component and a steay beam of the longitdinal polarization component are reflected on reflective surfaces 4a and 4b to be led to the resonator 1. Thus the resonance wavelength of the abnormal beam is varied. These two beams radiated from the resonator 1 are reflected on reflective surfaces 5a and 5b of a polarizing and synthesizing device 5 to be synthesized and then sent to a measurement control part via a rod lens 6 and an optical fiber 7. Then the pressure P is obtained from the difference of the resonance wavelength between both beams. In such way, the physical quantity is measured in a simple and effective way.
申请公布号 JPS57108710(A) 申请公布日期 1982.07.06
申请号 JP19800185803 申请日期 1980.12.26
申请人 TOKYO SHIBAURA DENKI KK 发明人 KOSEKI TAKESHI
分类号 G01D5/26 主分类号 G01D5/26
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