| 摘要 |
PURPOSE:To enable precise measurement by arranging oppositely an optical lattice prepared by arranging narrow-belt-shaped light-transmitting and light- intercepting parts alternately in a base member and another optical lattice prepared by arrangig on a semiconductor substrate narrow-belt-shaped semiconductor layers being of a conductive type contrary to the substrate at a prescribed pitch. CONSTITUTION:A light from a light-emitting device 18 is turned into parallel beams by a collimator lens 22, which are transmitted through a plurality of narrow-belt-shaped light-transmitting parts 14a of the first optical lattice 10 and applied to the semiconductor layers 30 of the second optical lattice 26 which are opposed to the light-transmitting parts 14a. By this application, a photoelectric transducing action is conducted at junction parts 40 of the semiconductor layers 30 of the second optical lattice 26 with the semiconductor substrate 28 thereof and an output voltage in accordance with a received luminous energy is generated between output terminals 34 and 36. When the second optical lattice 26 is moved in relation to the first optical lattice 10 by operating the spindle of a micrometer, a voltage is delivered between the output terminals 34 and 36 and, by counting the signal of this output, an amount of movement of the spindle can be measured as a length. |
