| 摘要 |
PURPOSE:To permit the analysis of the entire part of the deposit produced circumferentially in a button type battery or the like and also make the quantitative tracing of secular change possible by fixing the sample on a sample supporting table and so constituting the table that it can be rotated. CONSTITUTION:A button type battery 5 is fixed in a sample cup 6 on a sample table 1 by means of a set screw 7 for the purpose of leakage inspection and is set to a scanning type electron microscope. When a motor 2 is run, the battery 5 is rotated as well by means of a belt 3. It is possible to detect fluorescent X- rays uniformly from the entire part of the packing of the battery by regulating the scanning speed of an electron beam 13 and the rotating speed of the battery 5, and partial leakage is detected as well. |
