SURFACE ACOUSTIC WAVE (SAW) PRESSURE SENSOR STRUCTURE

摘要

SURFACE ACOUSTIC WAVE (SAW) PRESSURE SENSOR STRUCTURE A surface acoustic wave (SAW) pressure sensor is mechanically supported within a vacuum sealing structure by a cylindrical metal sleeve which isolates the SAW sensor substrate from induced thermal strain resulting from temperature cycling of the structure, and which provides for a fluid conduit through the vacuum environment from the sensor diaphragm to an orifice formed through the wall of the structure.