| 摘要 |
PURPOSE:To suppress a chip interval to a necessary minimum value by a method wherein a mask is provided on a sample when the sample is divided into a unit chip and a drawing operation starts when a drawing start position along an X-Y axis direction of each chip coincides with X-Y of a scaling value previously calculated. CONSTITUTION:When a sample is divided into a multiplicity of chips, a mask is mounted on the sample, wherein a scaling value X-Y concerned with shifting of a table has been given beforehand. Subsequently, a figure data corresponding to the scaling values X-Y being coded is stored in a storage file 21 and the data is supplied sequentially to CPU22 including a drawing control program and a memory. Subsequently, the output is delivered to a drawing data output portion 23 including a buffer, a dot convertion logic or the like, and then the output is successively outputted to a blanking circuit EOS, and the circuit EOS is controlled by utilizing a laser measuring equipment 24 for detecting a position along X-Y direction of a sample stand, a present position counter 25 and a synchronous control 26. |
