摘要 |
PURPOSE:To simply and surely compensate unbalance voltage by providing level differences between a pair of Hall output terminal regions and a region connecting two parallel control current paths located between the Hall output terminal regions. CONSTITUTION:Photo etching is applied to an N type GaAs layer on a semi- insulating GaAs substrate to make a six-terminal Hall element. At that time, level differences are provided between regions A, C provided with Hall output terminals 13, 23 and a region B connecting two parallel control current paths made by control electrodes 11, 12, 21, 22. With control current flowed by forming the polarity of power sources 14, 24 as shown in a drawing under zero magnetic field status, four right and left terminal Hall elements have asymmetrical output terminals, so unbalance voltages VHO1, VHO2 canceling polarity are generated. The polarity is completely canceled out by adjusting resistors 15, 25. Next, with a magnetic field H having the polarity shown in the drawing applied to the device, each Hall voltage VH1, VH2 at right and left sides becomes the same polarity because the direction of the magnetic field and that of current are the same and the output VH, the sum of each Hall voltage, will be obtained. |