| 摘要 |
PURPOSE:To simplify the check of positions and to remove pelllets precisely when defects pelleto are pushed off with a needle from semiconductor pellets attached to a sheet by spot lighting the places of defect pellets. CONSTITUTION:Plural semiconductor pellets arranged in line and attached to the back of a transparent or semitransparent sheet 2 are held on a top part of an inner cylinder 7 by putting the sheet 2 between the inner cylinder 7 and outter cylinder 6. A spot light source 10 set up so as to be united with a needle 9 to push off defect pellets from the sheet irradiates near the top of the needle 9. When the needle 9 is brought close to the sheet 2 and the spot light source 10 lightens pellets, the lighting image of a lighting spot is observed through mirrors 4, 5 and the position of the needle 9 is confirmed on the instant. Thus, if the lighting image is observed on the surface image of a defect pellet before the needle 9 pushes off the defect pellet, the defect pellet can be removed precisely. |
