| 摘要 |
PURPOSE:To take a high-precision measurement by allowing light reflected by a sample to strike the rotary analyzer through a hollow and coaxial internal space, and photodetecting its projection light. CONSTITUTION:Pinholes 15a and 26a of pinhole plates 15 and 26 are on the prolongation of the center line of a rotating center shaft 29, so the light reflected by the sample is guided to a photodetecting element 18 through the pinhole 26a, internal space of the center shaft 29, hole 40, rotary analyzer 36, hole 41, pinhole 15a, and filter 17. Then, the analyzer 36 rotates together with the rotating shaft 29 in one body and the rotary disk 32 of a rotary encoder RE also rotates together with the rotating shaft 29, so the angle of rotation of the analyzer 36 and the angle of rotation of the RE are invariably equal to each other and the light corresponds to light which is passed through the luminous flux passage formed in the hollow space part and supplied to the photodetecting element 18; and the output signal of the element 18 is processing to obtain a high-precision measured value. |
