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发明名称
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
摘要
申请公布号
GB2009497(B)
申请公布日期
1982.06.30
申请号
GB19780042009
申请日期
1978.10.26
申请人
TOKYO SHIBAURA DENKI KK
发明人
分类号
H01L21/225;H01L21/285;H01L21/3215;(IPC1-7):H01L21/22
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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