| 摘要 |
PURPOSE:To eliminate the influence of the heat of a heater radiated to the outside of a boat by disposing a metal made shade of high reflectivity against visible light or IR light on the outer side of the vapor deposition boat, and heating the vapor depositing material in the boat. CONSTITUTION:A shade 2 made by bending a metallic plate (e.g.; stainless steel plate) is disposed on the outer side of a vapor deposition boat 1 made of quartz glass. Here, 3 is a support base of the boat 1, and 4 is a W coil heater for heating of the vapor depositing material. Next, the vapor depositing material (e.g.; shot-like Se) is charged in the boat 1, and an Al drum is installed in the position apart by a prescribed distance in a perpendicular direction from the opening of the boat 1, and while this is rotated, the vapor deposition is accomplished. As a result, the temp. elevation of the drum is slight as compared to the case in which the shade 2 is not disposed, thus the drum is maintained at a desired temp. Namely, the leakage of heat to the outside of the boat 1 is considerably decreased and therefore the temp. rise of the substrate forming vapor deposition films in particular is prevented, and the leakage of heat to the outside of the boat 1 is decreased, hence, the vapor depositing material is heated with good efficiency at high temp. elevation rates. |
