| 摘要 |
PURPOSE:To prolong the lifetime of a thermal head by forming a Ta2O5 or/and Al2O3 wera resistant layer via an AlN protective layer on a heating resistor, thereby preventing the oxidation and deterioration of the resistor. CONSTITUTION:In a thin film type thermal head in which a heating resistor 2 of Ta2N or the like is formed on an insulator substrate 1 formed of glazed alumina or the like and a pair of electrodes 3, 4 formed of Au/Cu thin film or the like are provided at both ends, a wear resistant layer 5 formed of Ta2O5 or/and Al2O3 is formed via a protective layer 6 formed of AlN on the resistor 2. The layer 6 serves to prevent the oxidation and deterioration of the resistor 2, thereby remarkably increasing the lifetime of the thermal head. |
