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发明名称
ANLASS-VORRICHTUNG
摘要
申请公布号
DE3146961(A1)
申请公布日期
1982.06.24
申请号
DE19813146961
申请日期
1981.11.26
申请人
UNITED STATES DEPARTMENT OF ENERGY
发明人
DEAN STRATHMAN,MICHAEL;BROWNELL TRUE,RICHARD;KUMAR SADANA,DEVENDRA
分类号
H01J37/30;H01J37/317;H01L21/263;(IPC1-7):H01J37/31;H01L21/32
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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