| 摘要 |
PURPOSE:To obtain a high-sensitivity magnetic sensor by a method wherein a spiral coil electrode is provided on a thyristor pellet and the induced electromotive force of the electrode is conducted to a thyristor. CONSTITUTION:A cathode electrode 2 is formed on a P gate thyristor pellet 1 and a gate electrode 4 and a spiral coil electrode 6 connecting one end of the electrode 6 to the electrode 4 are formed in the manner of surrounding the electrode 2. The other end 6' of the electrode 6 is connected to the cathode region of a thyristor through an opening hole provided at an insulating film 5. An anode electrode 3 is led out of the rear of the pellet 1. Induced electromotive force by the magnetic field obtained from the spiral electrode is used as a control signal for a semiconductor element formed on the pellet. In this way, a high-sensitivity magnetic sensor performing self-operating control by detecting the magnetic field can be obtained. |
