| 摘要 |
PURPOSE:To manufacture the titled recording medium at a high speed without causing a curling phenomenon, by forming a thin film of Co alloy with vertical magnetic anisotropy on a substrate in a vacuum container on the conditions where a film forming speed and substrate temperature are specified. CONSTITUTION:In a vacuum tank 1, hearths 3 and 3' containing Co 6 and Cr 6', and a substrate 2 are arranged, and a main valve 8 is opened to evacuate the vacuum tank 1 to about 5X10<-6> Torr. Then, while a shutter 9 is closed, the Co 6 and Cr 6' are irradiated with electron beams 5 and 5' for preliminarily fusion, and the substrate 2 is applied with a 0--300V voltage from a DC power source 7. After the evaporation of the Co 6 and Cr 6' is stabilized, the shutter 9 is opened and while the substrate 2 is held below 200 deg.C, a thin film of Co alloy with vertical magnetic anisotropy is formed on the substrate at a 10-10,000Angstrom /S film forming speed. Thus, a tape-shaped magnetic medium which has the thin film with excellent reproducibility is obtained. |
