| 摘要 |
PURPOSE:To make a saturated Ga melt liquid to be distributed on substrates uniformly by a method wherein dividable plates to be divided on both sides respectively by sliding plates are provided between an upper chamber and a lower chamber. CONSTITUTION:The plate 12 dividable on both sides and the slider 6 are provided in the boat main body 1. The saturated Ga melt liquid 8 is filled up in the upper chamber 2, and the substrates 9 are provided in a holding device 10. The device 10 is provided in a middle chamber 3 separated by the plate 13 dividable on both sides and the slider 7. Then the plate 12 is separated by sliding the slider 6 leftward, and the melt liquid 8 drops in the chamber 3. Epitaxial growth is performed in this condition. When the slider 6 is transferred leftward moreover, the slider 7 slides, the plate 13 is divided, and the melt liquid 8 in the chamber 3 is accommodated in a drawer 5 in the chamber 4. Accordingly because the melt liquid 8 becomes as to be poured from the center of the substrates 9, uniform distribution can be attained. |
