ADJUSTMENT OF PICK UP NEEDLE

摘要

PURPOSE:To enable to regulate precisely protruding quantity, centering of a pick up needle to separate a die on a wafer sheet by a method wherein the pick up needle is adjusted in the X and Y directions by a graduated microscope being provided with a scale in the direction perpendicular to the plane. CONSTITUTION:The pick up needle 8 and a pick up collet 9 are provided to separate the die on the wafer sheet 1. When the wafer sheet 1 is fixed, the graduated microscope being provided with the scale in the direction perpendicular to the X and Y directions making a right angle on the plane is equipped to a holding fittings (not shown) so as to enable to monitor the positional relation of tip ends thereof. The lengthwise directional line 22 of the graduated microscope is made to coincide with the axial center line of the needle 8 or the collet 9, and centering and adjustment of protruding quantity of the needle are performed by monitoring the tip end part of the needle 8 from the horizontal direction. Accordingly adjustment of the needle can be performed precisely and rapidly.