| 摘要 |
PURPOSE:To obtain the titled feeder which feeds a film smoothly even in case of thermal deformation due to the transmission of laser light, by recovering a film for lens protection, which is passed between a condenser lens and a workpiece, not at a take-up side, but by a recovering means. CONSTITUTION:A film 5 unwound from a feed-side reel 6 is guided onto a laser transmission window 7 by guide rollers 8 and then its leader is guided into a redidue-recovering container 15 through pinch rollers 9 and 10. The end part of the film 5 suspended from the rollers 9 and 10 is melted by a heater 17 provided near the introduction opening 16 of the container 15 to drop on the buttom of the container 15, so that it is recovered as a residue 18. A workpiece 2 is worked with laser light 4 condensed through a condenser lens 3, which is prevented from collecting a work removal body scattering in this case, so that film 5 is fed. |
