| 摘要 |
PURPOSE:To obtain a magnetic sensor which generates a large and sharp pulse voltage by depositing two layers, differing in coercive force, and in composition of magnetic alloy of Fe, Ni and Co and a substrate, and providing a pickup on said substrate. CONSTITUTION:On a glass substrate which has a 100X10<-7>/ deg.C coefficient of thermal expansion, a mangetic thin film (soft film) which consists of 0-40wt% Co and Ni and Fe having a 85/15-40/60wt% ratio for the remainder and has small coercive force is formed by electron-beam vapor deposition, etc. On this film, another magnetic thin film (hard film) which has large coercive force and consists of 0-50wt% Co and Ni and Fe having a 10/90-30/70wt% ratio for the remainder is formed similarly by vapor deposition. In this case, the efficiency of the magnetization inversion of Co is made superior to that of Ni and Fe by increasing the uniaxial anisotropy in a magnetization direction. The obtained material is cut in a prescribed shape to prescribed size and used for a thin-film magnetic sensor. Thus, a fine, superior-characteristic sensor is obtained in a prescribed easier process than usual. |
