| 摘要 |
PURPOSE:To eliminate ununiformity of the sensitivity of the super-particulate gas sensor by detecting gas from the ratio of the resistance value in the absence of the gas to be detected to the resistance value in the presence of the gas to be detected. CONSTITUTION:The superparticulate gas sensor is constituted by providing an SiO2 film 7 on the surface of a p type silicon substrate 1, by providing electrodes 4', 4'' and 4''' on the surface of the film and by forming a superparticulate gas sensing film 5 on the top of the electrodes. As the thickness of this gas sensing film 5 is increased, an electric resistance value RO in the air where no gas to be detected is present is reduced. On the other hand, when the ratio of the above value to an electric resistance value RG in the presence of the gas to be detected is taken, the value thereof is fixed irrespective of inequality of RO. |
