| 摘要 |
<p>PURPOSE:To make film thickness of a filter layer equal, by providing a spectral characteristic transmitting rays for exposure to a lower layer, when a filter consists of an upper and lower layers having an overlapped part. CONSTITUTION:Photodetecting regions 4-7 are formed as a photodetector for an Si substrate 8. A color filter 1 with a color transmitting rays such as ultraviolet rays being an exposing light source, e.g., cyane is formed on the substrate 8. A color filter 2, e.g., yellow, which can absorb exposure rays is formed on it with overlapping partly. Thus, even if overlapped part to the filters 1,2 is present, the filter 2 is suitably exposed with the direct incident light and a reflected light from the substrate 8 to form the same thickness of film for the overlapped part and non-overlapped part. As a result, excellent spectral transmission characteristic and a picture with high quality are obtained.</p> |
