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发明名称
ETCHING DEVICE
摘要
申请公布号
JPS5794573(A)
申请公布日期
1982.06.12
申请号
JP19800169849
申请日期
1980.12.02
申请人
TOKYO SHIBAURA DENKI KK
发明人
USUDA KINYA;TSUCHIYA NOBUJI
分类号
C23F1/08
主分类号
C23F1/08
代理机构
代理人
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