发明名称 CHARACTER EXPOSURE DEVICE
摘要 PURPOSE:To obtain a character projecting device having no mechanical feed mechanism, by leading a light beam to a desired dial plate by an optical fiber. CONSTITUTION:When one of shutters 22-1-22-7 is opened, a light beam of a light source 21 passes through one of optical fibers 23-1-23-7 and is made incident to a character constituion member 24. In the character constitution member 24, a dial plate provided toward each end of the optical fibers 23-1-23-7 is stored. An image of a selected character is projected to a silicon wafer 28 on which a photosensitive material has been applied, by a lens 26, and a character such as a number, etc. for controlling the wafer is recorded.
申请公布号 JPS5794741(A) 申请公布日期 1982.06.12
申请号 JP19800171705 申请日期 1980.12.05
申请人 FUJITSU KK 发明人 OKA NOBUYUKI;NAKAMURA YOSHIHARU
分类号 G03B27/32;G03F7/20;H01L21/027;H01L21/30 主分类号 G03B27/32
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