Integrable pressure sensor giving electric output signal - has semiconductor resistor on membrane of another material, giving accuracy at high temp.

摘要

Pressure sensor gives an electric output signal when at least one semiconductor resistor is subjected to pressure, and resistor being applied to a membrane of another material. Pref. the resistor can be produced by etching or local doping (e.g. ion implantation) of a semiconductor film covering the entire surface. Pref. it consists of amorphous, polycrystalline or recrystallised Si, the Si being applied to the membrane by sputtering or evapn. The sensor can be integrated very well, gives accurate results at as high temps. as possible and can be cheaply.