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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPS5792858(A)
申请公布日期
1982.06.09
申请号
JP19800168044
申请日期
1980.12.01
申请人
HITACHI SEISAKUSHO KK
发明人
MURAMATSU AKIRA
分类号
H01L21/8226;H01L21/331;H01L21/762;H01L21/8228;H01L27/02;H01L27/082;H01L29/73
主分类号
H01L21/8226
代理机构
代理人
主权项
地址
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